SPARK LIMITATION CONTROL APPARATUS USING VARIABLE SLOPE AND ITS MEHTOD

摘要

PURPOSE: A spark restriction control device and a method using a variable gradient are provided to optimize the number of spark occurrences within a plasma reactor by varying a rising gradient of a peak value of a high voltage pulse. CONSTITUTION: A magnetic pulse compression tank(120) compresses the energy, outputted from a power supply(110) for charging a capacitor, into pulses with a nanosecond size by using a magnetic switch. A plasma reactor(130) generates plasma by using the pulse outputted from a magnetic pulse compression tank. The spark detecting part(140) detects a spark by using a size of a discharged current and a size of a pulse voltage applied in the plasma reactor. A controller(150) varies a rising gradient of a peak value of the high voltage pulse according to the number of spark detections outputted from the spark detecting part.