| 摘要 |
<p>In a method for producing a sensor element including at least one sensitive component, a masking layer made of a material which is thermally decomposable without residue is applied to the sensitive component, the sensitive component being essentially covered by the masking layer, a protective layer made of a temperature-stable material is applied to the masking layer, and the masking layer is removed by pyrolysis or a low-temperature-guided oxygen plasma. The resulting sensor element includes at least one sensitive component covered by a protective layer made of a temperature-stable material, the sensitive component and the protective layer being placed at a distance from each other.</p> |
