METHOD FOR MAKING SELECTIVE EMITTER WHEN SOLAR CELL IS FABRICATED

摘要

PURPOSE: A method for selectively forming an emitter in a solar cell manufacturing process is provided to improve the efficiency of a work by selectively forming the emitter without particles on the substrate. CONSTITUTION: The upper side of a first conductive silicon substrate is textured. N type impurity ions are implanted and diffused to the upper part of the first conductive type silicon substrate. A PSG(Phosphorus Silicate Glass) layer(16) is formed on the surface of the substrate by a diffusion process. The heat energy is locally transmitted to the PSG layer by using a selective emitter forming device(20) made by patterning a thermally conductive pin. A selective emitter(17) is formed by doping the lower side of the electrode bus bar of the second conductive type semiconductor layer with impurities of high density.