发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE: A semiconductor device is provided to fill a conductive layer in a trench for a pad by forming a plurality of protrusions on a pad unit. CONSTITUTION: A plurality of conductive lines are buried in a substrate. A trench for a pad connects four line type trenches. The trench for the pad includes a plurality of punches. The width(W2) of the line type trench and the space width(W3) between adjacent line type trenches are equal to the width(W4) of the buried conductive lines.
申请公布号 KR20110060736(A) 申请公布日期 2011.06.08
申请号 KR20090117418 申请日期 2009.11.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LIM, HEE YOUL;PARK, SA RO HAN
分类号 H01L21/336 主分类号 H01L21/336
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