发明名称 |
MEMS SENSOR WITH MOVABLE Z-AXIS SENSING ELEMENT |
摘要 |
<p>A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure positioned radially outward from the MEMS structure. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.</p> |
申请公布号 |
EP2328833(A2) |
申请公布日期 |
2011.06.08 |
申请号 |
EP20090791225 |
申请日期 |
2009.08.06 |
申请人 |
ANALOG DEVICES, INC. |
发明人 |
ZHANG, XIN;JUDY, MICHAEL, W. |
分类号 |
G01P15/08;G01P15/125;G01P15/18;G01P21/00 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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