| 摘要 |
PURPOSE: An apparatus and a method for measuring the connection resistance of an anisotropic conductive film are provided to accurately measure the connection resistance generated from the anisotropic conductive film. CONSTITUTION: Electrodes(52a to 52d) are successively formed on a first substrate(50). One end parts of the electrodes are expanded to the lateral external side of the first substrate. Conductive pads(62a to 62c) are successively formed on a second substrate(60). Current source(80) applies a current to a second electrode, an anisotropic conductive film, and a second conductive pad. A voltage measuring unit(82) is in connection with a third electrode and a fourth electrode to measure the voltage change of the second electrode, the anisotropic conductive film, and the second conductive pad. |
