| 摘要 |
<p>The present invention provides method and apparatus for automatically correcting aberrations in a charged-particle beam. The method and apparatus permit a human operator to automatically and easily correct aberrations in the beam unconsciously of a complex procedure of aberration correction. The apparatus has a memory for storing image data obtained by scanning a specimen with the beam. A four-side region-blurring device reads the image data from the memory and blurs regions close to the four sides of an image represented by the image data. A probe profile extractor extracts the probe profile from the image that has been blurred as mentioned above. A line profile extractor extracts line profiles from the extracted probe profile. A correction amount-calculating unit performs extraction of amounts of features, calculations of aberrations, judgment on corrections of the aberrations, and setting of an amount of feedback about the extracted line profiles. A correcting unit corrects the aberration corrector based on the set amount of feedback.</p> |
