MEMS resonator with transistor and oscillator comprising such a resonator

摘要

The resonator (300) has a semi-conductive case (330) in which a conduction element is formed, where the element has a semi-conductive region forming a channel connecting source and drain regions (308, 309). A gap is formed between a vibrating beam (310) and the case. The case is integrated with the beam such that a channel is extended with respect to the gap. The gap encloses a microstructure made of piezoelectric material to assure electromechanical coupling between the beam and the channel to modulate conductibility of the element at vibration frequency of the beam.