| 发明名称 |
WAFER TRANSFER APPARATUS FOR WAFER INSPECTION SYSTEM |
| 摘要 |
<p>PURPOSE: A wafer transferring device of a wafer inspecting apparatus is provided to memorize the rotation quantity of a belt pulley by adopting a motor encoder with a battery after power is interrupted. CONSTITUTION: A belt transfer apparatus(18) is arranged on a vision inspection region. The length of a belt(11) of a belt transfer device is equal to the water supply interval. The belt contact position of wafers(12) are constantly maintained.</p> |
| 申请公布号 |
KR20110060054(A) |
申请公布日期 |
2011.06.08 |
| 申请号 |
KR20090116525 |
申请日期 |
2009.11.30 |
| 申请人 |
HANMISEMICONDUCTOR CO., LTD. |
发明人 |
YOO, JEONG SOO;KIM, DONG EON |
| 分类号 |
H01L21/677;B65G49/07;H01L21/66 |
主分类号 |
H01L21/677 |
| 代理机构 |
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| 地址 |
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