发明名称
摘要 <p>A module for use in a system for processing articles, in which the system includes a plurality of machine tools for processing articles, a pod for carrying the articles to be processed by the machine tools from one machine tool to another, a host processing controller associated with the machine tools for controlling the operation thereof, a robot connected to each machine tool for receiving a pod, opening the pod and for transporting the articles from within the pod into position on the machine tool for processing. An identification device is carried by the pod for identifying a particular pod and the articles carried in the pod. The module includes a single wire connection between the identification system, the host controller and the robot. The module has a microprocessor to identify the source of a signal and for routing the signal between the identification system and the host controller and between the host controller and the robot depending on its source.</p>
申请公布号 JP4698833(B2) 申请公布日期 2011.06.08
申请号 JP20000539514 申请日期 1998.12.10
申请人 发明人
分类号 H01L21/02;H01L21/677;G03F7/20;G05B19/418 主分类号 H01L21/02
代理机构 代理人
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