Dust removing device and dust removing method

摘要

In a piezoelectric device (30), a first electrode (32) and a second electrode (33) are disposed to be opposed to each other on plate surfaces of the piezoelectric device (30), a first electrode plane (36) of the piezoelectric device (30) is fixedly bonded to a plate surface of a vibrating plate (20), a piezoelectric material (31) forming the piezoelectric device (30) is polarized in a direction parallel to the first electrode plane (36), the piezoelectric device (30) is fixed to a base through a second electrode plane (37) of the piezoelectric device (30), and the piezoelectric device (30) generates a thickness-shear vibration with the fixed second electrode plane (37) being a reference plane. The piezoelectric vibration generated by the piezoelectric device (30) generates a flexural vibration in the vibrating plate (20), to thereby remove dust adhering to a surface of the vibrating plate (20).