| 摘要 |
PURPOSE: Apparatus, method, and system for measuring a 3D surface shape are provided to enable vertical focusing on a target and same-interval linear scanning using a telecentric F-Theta lens as the lens of a device for measuring the 3D surface shape. CONSTITUTION: An apparatus for measuring a 3D surface shape comprises a light source(141), a rotating mirror(145), a telecentric F-Theta lens(147), a light sensor(149) and a half reflector(143). The light source radiates laser light to the surface of a target, of which 3D surface shape is measured. The rotating mirror rotates at a given speed and deflects laser lights, which are radiated from the light source and reflected from the target. The telecentric F-Theta lens makes the laser light deflected from the rotating mirror enter the surface of the target perpendicular. The telecentric F-Theta lens linearly moves the laser light along the surface of the target and scans the surface of the target.
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