METHOD FOR COLOR FILTER OF SOLID STATE IMAGING DEVICE, COLOR FILTER BY THE METHOD AND SOLID STATE IMAGING DEVICE INCLUDING THEREOF

摘要

PURPOSE: The color filter manufactured with the manufacturing method of the color filter for the solid imaging device using the ultrashort wavelength exposure, and the method thereof and solid imaging device including the same forms the minute colored pattern into the limit resolution lowing. CONSTITUTION: By coating each color coloured photosensitive resin composition including the photopolymerization initiator reacting to the ultra-high frequency less than 300nm in the top of the substrate film is formed(S1). The ultrashort wavelength laser less than 300nm becomes in the formation area of the colored pattern of film with Joshi by using the ultrashort wavelength exposure having the numerical aperture more than 0.6(S2).