APPARATUS FOR WAFER TRANSFER

摘要

PURPOSE: An apparatus for transferring wafers is provided to reduce a deposition disturbing area by minimizing the contact of a wafer support and a supporting frame. CONSTITUTION: A supporting frame(320) is fixed to a wafer transferring body part(310). A wafer support(330) is in connection with the supporting frame to support a wafer(301). The wafer support is composed of a fixing unit and a wafer support unit supporting the wafer. The fixing unit is fixed to the supporting frame using a screw. The wafer supporting unit is bent into a V-shape in order to minimize the contact area of the wafer and the wafer supporting unit.