发明名称 RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS.
摘要 A radiation system includes a target material supply configured to supply droplets of target material along a trajectory, and a laser system that includes an amplifier and optics. The optics are configured to establish a first beam path which passes through the amplifier and through a first location on the trajectory, and to establish a second beam path which passes through the amplifier and through a second location on the trajectory. The laser system is configured to generate a first pulse of laser radiation when photons emitted from the amplifier are reflected along the first beam path by a droplet of target material at the first location on the trajectory. The laser system is configured to generate a second pulse of laser radiation when photons emitted from the amplifier are reflected along the second beam path by the droplet of target material at the second location on the trajectory.
申请公布号 NL2004837(A) 申请公布日期 2011.01.10
申请号 NL20102004837 申请日期 2010.06.07
申请人 ASML NETHERLANDS B.V., 发明人 LOOPSTRA, ERIK;IVANOV, VLADIMIR;MOORS, JOHANNES;SWINKELS, GERARDUS;YAKUNIN, ANDREI;GRAAF, DENNIS;STAMM, UWE
分类号 G03F7/20;H05G2/00 主分类号 G03F7/20
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