| 摘要 |
PURPOSE: An apparatus and a method for processing substrates are provided to prevent the generation of particles due to the friction/abrasion of a rotary supporting unit by rotating, aligning, and supporting a rotary shaft in contact with a spin chuck using a non-contact method. CONSTITUTION: A processing chamber(100) includes a space in which a substrate processing process is implemented. A spin chuck(400) chucking a substrate is arranged in the processing chamber. A rotary driving unit rotates the spin chuck. The rotary driving unit comprises a driving magnetic substance. The driving magnetic substance faces a driven magnetic substance in the radial direction of a rotary shaft(510). The rotary driving unit comprises a driving unit(530) rotating the driving magnetic substance around the rotary shaft.
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