| 摘要 |
A driving control apparatus for driving a controlled object. The apparatus includes first and second interferometers, each of which (i) detects a position of the controlled object in a predetermined direction and (ii) produces a respective detection value. A control unit obtains a rotation amount of the controlled object based on the detection values produced by the first and second interferometers, at a predetermined measurement timing, to calculate a controlled variable based on the rotation amount and a target value, and to output the controlled variable. A generation unit generates the rotation amount based on a difference value between two average values, one being an average value of detection values that are obtained by the first interferometer between a first measurement timing and a second measurement timing, immediately after the first measurement timing, and the other being an average value of detection values that are obtained by the second interferometer between the first measurement timing and the second measurement timing. The generation unit outputs the generated rotation amount to the control unit at the second measurement timing.
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