发明名称 Secure photomask with blocking aperture
摘要 A secure photomask including a substrate having one or more pattern layers formed thereon and a blocking aperture disposed below the one or more pattern layers that prevents at least one of unauthorized use and copying of the photomask.
申请公布号 US7851110(B2) 申请公布日期 2010.12.14
申请号 US20080105992 申请日期 2008.04.18
申请人 PHOTRONICS, INC. 发明人 PROGLER CHRISTOPHER J.
分类号 G03F1/00 主分类号 G03F1/00
代理机构 代理人
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