发明名称 Integrated circuit and methods of manufacturing the same
摘要 A method of manufacturing an integrated circuit includes forming landing pads in an array region of a substrate, individual ones of the landing pads being electrically coupled to individual ones of portions of devices formed in the substrate in the array region. The method also includes forming wiring lines within a peripheral region of the substrate. Forming the landing pads and forming the wiring lines includes a common lithographic process being effective in both the array and peripheral regions. The wiring lines and the landing pads of the integrated circuit are self-aligned.
申请公布号 US7851356(B2) 申请公布日期 2010.12.14
申请号 US20070863528 申请日期 2007.09.28
申请人 QIMONDA AG 发明人 TEGEN STEFAN;MUEMMLER KLAUS;BAARS PETER;MIERAU UTA
分类号 H01L21/4763 主分类号 H01L21/4763
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