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发明名称
METHOD OF DRY ETCHING, DRY ETCHING GAS AND PROCESS FOR PRODUCING PERFLUORO-2-PENTYNE
摘要
申请公布号
KR101001128(B1)
申请公布日期
2010.12.14
申请号
KR20057000709
申请日期
2003.07.16
申请人
发明人
分类号
C07C17/25;H01L21/3065;C03C25/68;C07C17/26;C07C21/18;C07C21/22;H01L21/311;H01L21/3213
主分类号
C07C17/25
代理机构
代理人
主权项
地址
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