发明名称 Method of manufacturing non-volatile memory device
摘要 Non-volatile memory devices and a method of manufacturing the same, wherein data storage of two bits per cell is enabled and the devices can pass the limit in terms of layout, whereby channel length can be controlled. The non-volatile memory device includes gate lines formed in one direction on a semiconductor substrate in which trenches are formed, wherein the gate lines gap-fill the trenches, a dielectric layer formed between the semiconductor substrate and the gate lines, bit separation insulating layers formed between the semiconductor substrate and the dielectric layer under the trenches, and isolation structures formed by etching the trenches, and the dielectric layer and the semiconductor substrate between the trenches in a line form vertical to the gate lines and gap-filling an insulating layer.
申请公布号 US7851311(B2) 申请公布日期 2010.12.14
申请号 US20090497280 申请日期 2009.07.02
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KIM NAM-KYEONG;OM JAE CHUL
分类号 H01L21/336 主分类号 H01L21/336
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