MECHANICALLY-COUPLED VIBRATING TUNING FORK-SCANNING PROBE SYSTEM

摘要

PURPOSE: A tuning fork-scanning probe bond vibrator system is provided to sensitively detect the sheer force between the inspection end of the scanning probe and a surface of a sample. CONSTITUTION: A tuning fork(110) is vibrated by approval of AC(Alternating Current) voltage. A scanning probe(120) is attached to one side of the tuning fork. The scanning probe is vibrated by the tuning fork. The contact member(130) is touched with the side of the scanning probe. The contact member adjusts the location of a contact point contacted with the scanning probe. By adjusting, the intrinsic vibration number of a coupled member is combined with the tuning fork and scanning probe.