发明名称 Method and resultant structure for floating body memory on bulk wafer
摘要 A method for making floating body memory cells from a bulk substrate. A thin silicon germanium and overlying silicon layers are formed on the bulk substrate. Anchors and a bridge are formed to support the silicon layer when the silicon germanium layer is etched so that it can be replaced with an oxide.
申请公布号 US7851862(B2) 申请公布日期 2010.12.14
申请号 US20090384424 申请日期 2009.04.02
申请人 INTEL CORPORATION 发明人 CHANG PETER L. D.
分类号 H01L27/01 主分类号 H01L27/01
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