发明名称 Semiconductor device test structures and methods
摘要 Semiconductor device test structures and methods are disclosed. In a preferred embodiment, a test structure includes a feed line, a stress line disposed proximate the feed line, and a conductive feature disposed between the stress line and the feed line. The test structure includes a temperature adjuster proximate at least the conductive feature, and at least one feedback device coupled to the temperature adjuster and at least the conductive feature.
申请公布号 US7851237(B2) 申请公布日期 2010.12.14
申请号 US20070710086 申请日期 2007.02.23
申请人 INFINEON TECHNOLOGIES AG 发明人 WALTER WOLFGANG
分类号 G01R31/26;H01L21/66 主分类号 G01R31/26
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