CHEMICAL VAPOR DEPOSITION APPARATUS FOR MANUFACTURING THIN-FILM SOLAR CELLS

摘要

PURPOSE: A chemical vapor deposition device for manufacturing a thin film solar cell is provided to be easily repaired and maintained by a user by completely sending a reaction chamber to the front of a process module chamber by a sliding unit with a dual sliding structure. CONSTITUTION: A transfer module chamber(170) comprises a substrate handling robot(180) which handles a substrate for manufacturing a thin film solar cell. A load lock chamber(110) is connected to one side of the transfer module chamber and is divided into an input load lock chamber(110a) and an output load lock chamber(110b). A process module chamber(120) includes a reaction chamber and a reaction chamber fixing plate and deposits the substrate.