IMAGE DATA PROCESSING METHOD

摘要

PURPOSE: A method for processing image data is provided to measure the linewidth of a bar pattern by using an automatic rotation angle correction algorithm. CONSTITUTION: Image data including at least one bar pattern is obtained(S100). The coordinates of an edge of a bar pattern are detected(S200). The outline curve of the bar pattern is extracted(S300). A major axial direction is set by differentiating the outline curve of the bar pattern. The image data is rotated so that the major axis coincides with the reference axis(S400). The information of the bar pattern is extracted by processing the bar pattern of the image data.