发明名称 |
FLUORINE-CONTAINING COMPOUND, FLUORINE-CONTAINING POLYMER, RESIST COMPOSITION, TOPCOAT COMPOSITION, AND METHOD FOR FORMING PATTERN |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a resist composition that forms a pattern by using a high energy beam or electron beam having a wavelength of 300 nm or less, and to provide a resin that is used for a topcoat composition in immersion lithography and has water repellency, especially a large receding contact angle. <P>SOLUTION: There is provided a fluorine-containing polymer of a mass average molecular weight of 1,000-1,000,000 having a repeating unit (a) represented by general formula (2), (wherein R<SP>1</SP>indicates a group containing a polymerizable double bond; R<SP>2</SP>indicates a fluorine atom or a fluorine-containing alkyl group; R<SP>8</SP>indicates a substituted or unsubstituted alkyl group or the like; and W<SP>1</SP>indicates a single bond, an unsubstituted or substituted methylene group or the like). <P>COPYRIGHT: (C)2011,JPO&INPIT |
申请公布号 |
JP2010275498(A) |
申请公布日期 |
2010.12.09 |
申请号 |
JP20090131919 |
申请日期 |
2009.06.01 |
申请人 |
CENTRAL GLASS CO LTD |
发明人 |
MORI KAZUKI;HAGIWARA YUJI;NAGAMORI MASASHI;ISONO YOSHIMI;NARIZUKA SATOSHI;MAEDA KAZUHIKO |
分类号 |
C08F20/22;C07C69/003;C07C69/013;C07C69/017;C07C69/67;C08F12/14;C08F16/12;C08F32/08;G03F7/039;G03F7/11;G03F7/32;G03F7/38 |
主分类号 |
C08F20/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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