| 摘要 |
PROBLEM TO BE SOLVED: To easily determine a position at which an FOV (that is, an evaluation point (EP)) including a device having electric characteristics should be arranged in order to verify finished accuracy required for circuit operation. SOLUTION: From device shape information (including circuit design data and layout design data) possessed by CAD data, an image obtaining condition for allowing all configuration areas required for electric characteristics measurement to be confined within FOVs and allowing the FOVs to be arranged along the device shape so that they may not overlap one another is determined. Since a wiring part of the device is represented by a combination of a plurality of basic constituent figures depending on the shape of the wiring part, processing for arranging the FOV for each constituent figure is performed. For a cell part, the FOV is arranged on the basis of a cell outer frame and apexes, where either one apex is a start point for the FOV arrangement processing, while another apex is an end point for the processing. COPYRIGHT: (C)2011,JPO&INPIT |
