发明名称 SEMICONDUCTOR DEVICE AND INDUCTOR
摘要 A semiconductor device and an inductor are provided. The semiconductor device includes a top level interconnect metal layer (Mtop) pattern. A below-to-top level interconnect metal layer (Mtop−1) pattern is disposed directly below the top level interconnect metal layer pattern. A first via plug pattern is vertically disposed between the top level interconnect metal layer pattern and the below-to-top level interconnect metal layer pattern, electrically connected to the top level interconnect metal layer pattern and the below-to-top level interconnect metal layer pattern. The top level interconnect metal layer pattern, the below-to-top level interconnect metal layer pattern and the first via plug pattern have profiles parallel with each other from a top view.
申请公布号 US2010308470(A1) 申请公布日期 2010.12.09
申请号 US20090550646 申请日期 2009.08.31
申请人 SILICON MOTION, INC. 发明人 CHEN TE-WEI
分类号 H01L23/522;H01F5/00 主分类号 H01L23/522
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