| 摘要 |
PROBLEM TO BE SOLVED: To provide a method, in which no chipping of a resin layer develops and, at the same time, the opening width at the bottom of the resin layer, the opening width at the top of the resin layer and the opening with of a screen printing mask can be formed nearly the same as one another in the method for manufacturing a screen printing mask with resin including the process for manufacturing the resin layer and a masking layer on a first surface of the screen printing mask with an opening part, the process for removing the resin layer on the opening part of the first surface by supplying resin layer removing liquid from a second surface opposite to the first layer of the screen printing mask and the process for removing the masking layer. SOLUTION: In the method for manufacturing the screen printing mask with resin, the resin layer including photo-crosslinkable resin and the masking layer are formed on the first surface of the screen printing mask with opening part. Then, the whole surface of the resin layer is irradiated with active light from the side of the first surface, then the resin layer on the opening part of the first surface is removed by supplying the resin layer removing liquid from the second surface opposite to the first surface of the screen printing mask and then the masking layer is removed. COPYRIGHT: (C)2011,JPO&INPIT
|
