发明名称 Transistor Level Routing
摘要 System and method for transistor level routing is disclosed. A preferred embodiment comprises a semiconductor device including a first semiconductor device formed on a first active area in a substrate, the first semiconductor device having a first gate stack comprising a first high-k dielectric layer, a first metal layer and a first poly-silicon layer. The semiconductor device further includes a second semiconductor device formed on a second active area in the substrate, the second semiconductor device having a second gate stack comprising a second high-k dielectric layer, a second metal layer and a second poly-silicon layer. An electrical connection connects the first semiconductor device with the second semiconductor device and overlies the first active area, the second active area and a portion of the substrate between the first active area and the second active area. The electrical connection includes a high-k dielectric layer and a metal layer but not a poly-silicon layer and the metal layer is arranged directly over the high-k dielectric layer.
申请公布号 US2010308410(A1) 申请公布日期 2010.12.09
申请号 US20090481183 申请日期 2009.06.09
申请人 OSTERMAYR MARTIN;SARMA CHANDRASERHAR 发明人 OSTERMAYR MARTIN;SARMA CHANDRASERHAR
分类号 H01L27/088;H01L21/8234 主分类号 H01L27/088
代理机构 代理人
主权项
地址