| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a workpiece holding material capable of easily adjusting a compression ratio, and capable of suppressing the permeation of polishing liquid. <P>SOLUTION: On a base material 7, a wet foam layer 4 as a second foam layer is formed by a wet-coagulation method, and a dry foam layer 2 as a first foam layer is formed by dry foaming, and the wet foam layer 4 is laminated on the dry foam layer 2 through an adhesive layer 3 such that a surface 4a of the foam layer 4 is located on a lower side. By peeling the base material 7 on a back surface 4b side of the wet foam layer 4, the back surface 4b works as a holding surface for holding the workpiece holding material. <P>COPYRIGHT: (C)2011,JPO&INPIT |
