PHOTOELECTRIC CONVERSION DEVICE, METHOD OF MANUFACTURING THE SAME, MANUFACTURING APPARATUS, AND DIAPHRAM MATERIAL

摘要

PROBLEM TO BE SOLVED: To facilitate forming the wiring with a high aspect ratio on a surface of a photoelectric conversion device.

SOLUTION: A diaphram material A1 having a photo-setting resin is discharged from a first discharge part 52 moving to scan a surface of a substrate W, and is irradiated with an UV light from backward to be set. A wiring material is discharged from a second discharge part 54 moving further backward. When this takes place, as diaphrams B1 and B2 are formed in a peripheral part at a discharge position of the wiring material, the wiring material does not spread in a plane direction, and a wiring CW with the high aspect ratio can be formed. The diaphrams B1 and B2 are sealed along with the wiring by using the material having a refractive index equal to a sealer, or are put in a semi-curing state by light irradiation and volatilized by heat treatment after the wiring is formed.

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