| 摘要 |
PROBLEM TO BE SOLVED: To suppress the enlargement of an opening part of a tantalum vessel due to a carburizing treatment when the tantalum vessel having the opening part is subjected to the carburizing treatment. SOLUTION: There is provided a method for carburizing treatment of a tantalum vessel 1 which is made of tantalum or a tantalum alloy and has a bottom face part 1a, a side wall part 1b extending in a nearly vertical direction from the bottom face part 1a, and the opening part 1d formed by the end part 1c of the side wall part 1b, and the method subjects the tantalum vessel 1 to the carburizing treatment for infiltrating carbon toward inside from the surface of the vessel 1, and includes: a process for arranging the tantalum vessel 1 in a chamber 3 in which a carbon source exists so that the opening part 1d of the tantalum vessel 1 faces downward; and a carburizing treatment process for infiltrating carbon from the carbon source from the surface of the tantalum vessel 1. COPYRIGHT: (C)2011,JPO&INPIT
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