| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric device for preventing variation in oscillation frequencies. SOLUTION: The piezoelectric device includes: an element mounting member forming a recessed space by a base part and a frame part formed on one main surface of the base part; a piezoelectric vibration element mounted on a pair of two piezoelectric vibration element mounting pads formed on the main surface of the base part, which is exposed to the recessed space, and having an excitation electrode; a first hollow part formed on the main surface of the frame part which is the opened side of the recessed space so as to surround the recessed space; a second hollow part formed on the main surface of the frame part which is the opened side of the recessed space so as to surround the first hollow part; a sealing member formed in the first hollow part; and a cover member composed of a cover body part and a wall part so that the wall part is bonded to the sealing member and the piezoelectric vibration element is airtightly sealed. COPYRIGHT: (C)2011,JPO&INPIT
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