| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor substrate processing device that prevents a processing defect of a semiconductor device by speedily grasping abnormality of an operation state of a lift pin and is surely improved in yield of products by greatly reducing manufacture loss of the semiconductor device. SOLUTION: The semiconductor substrate processing device has a function 1 of always monitoring the load on a motor 11 driving the lift pin 2 and a function 2 of regarding the operation of the lift pin 2 as abnormality when variance in voltage value of the function 1 exceeds a standard value, and allows the elevation state of the lift pin 2 to be speedily grasped by speedily grasping the load on the motor 11 driving the lift pin 2. COPYRIGHT: (C)2011,JPO&INPIT |
