发明名称 |
PIEZOELECTRIC VIBRATOR MANUFACTURING METHOD, FIXING JIG, PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND RADIO-CONTROLLED WATCH |
摘要 |
The piezoelectric vibrator comprises a base substrate; a lid substrate in which cavity recesses are formed and which is bonded to the base substrate in such a state that the recesses face the base substrate; a piezoelectric vibration member bonded to the upper face of the base substrate in such a state that it is housed in the cavity formed of the recess between the base substrate and the lid substrate; an external electrode formed on the lower face of the base substrate; a through-electrode formed in and through the base substrate and electrically connected with the external electrode with keeping the airtightness inside the cavity; and a routing electrode formed on the upper face of the base substrate to electrically connect the through-electrode to the bonded piezoelectric vibration member; wherein the through-electrode is formed of a cylindrical body, which is formed of a glass material to have two flat ends and a thickness substantially equal to that of the base substrate, and is implanted in the through-hole running through the base substrate; and an electroconductive core member which is formed to have two flat ends and a thickness substantially equal to that of the base substrate and is inserted into the center hole of the cylindrical body; and the through-hole, the cylindrical body and the core member are integrally fixed to each other by firing.
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申请公布号 |
US2010308694(A1) |
申请公布日期 |
2010.12.09 |
申请号 |
US20100857234 |
申请日期 |
2010.08.16 |
申请人 |
NUMATA MASASHI;ARATAKE KIYOSHI;ONITSUKA OSAMU;FUKUDA JUNYA;SUGAMA KAZUYOSHI |
发明人 |
NUMATA MASASHI;ARATAKE KIYOSHI;ONITSUKA OSAMU;FUKUDA JUNYA;SUGAMA KAZUYOSHI |
分类号 |
H01L41/053;B23Q3/00;H01L41/047;H01L41/22 |
主分类号 |
H01L41/053 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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