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发明名称
Verfahren zum Herstellen von duennen Schichten aus Tantal
摘要
申请公布号
DE2110987(A1)
申请公布日期
1972.09.14
申请号
DE19712110987
申请日期
1971.03.08
申请人
SIEMENS AG
发明人
SCHAUER,ALOIS,DR.
分类号
C23C14/14;H01B1/00;H01L21/70;H01L49/02
主分类号
C23C14/14
代理机构
代理人
主权项
地址
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