INSULATOR, ITS MANUFACTURING METHOD, AND CHARGED PARTICLE BEAM SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide an insulator which has high insulation resistance and hardly deteriorates. SOLUTION: The insulator (2) includes a pair of electrodes (4a, 4b), and a base body (5) arranged between the pair of electrodes (4a, 4b). A part of a zone (5a) on the surface of the base body (5) is semi-conductive, and the other zone (5b) on the surface of the base body is made of an insulating crystal. The part of the semi-conductive zone (5a) is electrically connected with the pair of electrodes (4a, 4b). Further, the base body (5) has a surface resistance value of 106-1011Ω/square on the part of the zone (5a), and has the surface resistance value of 1012Ω/square or more on the other zone (5b). COPYRIGHT: (C)2011,JPO&INPIT