| 摘要 |
Ends (134a-1) of projections (134a) do not contact a first substrate (11), forming a gap between the ends (134a-1) and the first substrate (11). The internal capacity of a suction pump (17) can be increased by an amount by which the projections (134a) are shortened, compared to a conventional structure in which pillars are formed to connect the ceiling and bottom of the cavity of a capillary pump. The capacity of the suction pump (17) can be increased without enlarging the planar shape. Further, the ends (134a-1) of the projections (134a) do not contact the first substrate (11), forming a gap between them. An impurity can pass through the gap, and clogging of the inside of the suction pump (17) with the impurity can be prevented, realizing a stable operation. |
