Micromechanical system for use in microphone, comprises thin structured polysilicon layers between substrate and micromechanical functional layer, where one of polysilicon layer has stabilizing bar

摘要

The micromechanical system comprises thin structured polysilicon layers (5) between a substrate (1) and a micromechanical functional layer. One of the polysilicon layers has a stabilizing bar (2) that runs perpendicular to the polysilicon layer. The stabilizing bar is formed in the form of U-shaped double webs. An independent claim is also included for a method for manufacturing a micromechanical component.