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发明名称
Method for Preparing Metal Doped Transparent Conductive Oxide Thin Film and Thin Film Transistor Using the Same
摘要
申请公布号
KR100999501(B1)
申请公布日期
2010.12.09
申请号
KR20080087342
申请日期
2008.09.04
申请人
发明人
分类号
H01L21/20;H01L21/265;H01L29/786
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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