MACHINING DEVICE, MACHINING METHOD, AND STORAGE MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a machining device which can prevent an electrode line from being broken by properly controlling a slicing speed, and a machining method, and a storage medium. SOLUTION: The machining device 10 includes a processing vessel 11, an ingot holding part 13 for holding a silicon ingot 30 immersed in electrolytic solution 12 in the processing vessel 11, an electrode device 14 for slicing the silicon ingot 30 by an electrode line 38 and an electrode device holding part 15 for holding the electrode device 14. A detecting part 33 detects a current between the electrode device holding part 15 and the ingot holding part 13. A control part 50 stops a lifting operation of the ingot holding part 13 relative to the electrode device holding part 15 in accordance with a current value form the detecting part 33 or lowers a lifting speed of the ingot holding part 13 relative to the electrode device holding part 15. COPYRIGHT: (C)2011,JPO&INPIT