| 摘要 |
PROBLEM TO BE SOLVED: To achieve accurate breaking by applying uniform force to a substrate on which a scribing line is formed. SOLUTION: The substrate is held on a table 22, and the substrate is positioned by a positioning part 30 while projecting the substrate to a side direction of the table 22. Then, a part of a substrate 23 on a table is locked by a clamp unit 40, and breaking along a scribing line is conducted by pressing a projecting part of the substrate 23 with the use of a breaking unit 50. In this way, breaking can easily be conducted by applying uniform force even when the substrate has a small diameter. COPYRIGHT: (C)2011,JPO&INPIT |
