LITHOGRAPHIC APPARATUS AND METHOD OF ILLUMINATION UNIFORMITY CORRECTION AND UNIFORMITY DRIFT COMPENSATION

摘要

PROBLEM TO BE SOLVED: To provide a lithographic apparatus with a uniformity collection system.

SOLUTION: A system finger is movably configured so that it can be moved to the inside or outside of the intersection with a radiation beam to correct the intensity of respective parts of the radiation beam. The system includes a working device that is configured to be combined with a corresponding finger in the fingers to move the corresponding finger. The width of the tip of each finger is about a half of that of the working device.

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