NOVEL SILICON AMINOALKOXIDE COMPLEXES CONTAINING SILICON-SILICON BONDING AND PROCESS FOR PREPARING THEREOF
摘要
PURPOSE: A silicon amino alkoxide compound is provided to use as a silicon ingredient for thin film deposition or alloy manufacturing. CONSTITUTION: A silicon amino alkoxide compound is denoted by chemical formula 1. A silicon amino alkoxide compound is prepared by reacting alkali metal salt of chemical formulas 4(M^1O-A^1-ONR^1R^2) and 5(M^2O-A^2-ONR^4R^5) with a silicon compound of chemical formula 3([R^6]_3-a-bX^1_bX^2_aSi-SiX^1_nX^2_m[R^3]_3-n-m). A silicon-containing thin film is prepared using the silicon amino alkoxide compound as a precursor. The thin film is formed by metal organic chemical vapor deposition or atom layer deposition.
申请公布号
KR20100129608(A)
申请公布日期
2010.12.09
申请号
KR20090048255
申请日期
2009.06.01
申请人
KOREA RESEARCH INSTITUTE OF CHEMICAL TECHNOLOGY
发明人
CHUNG, TAEK MO;KIM, CHANG GYOUN;LEE, YOUNG KUK;AN, KI SEOK;LEE, SUN SOOK;JUNG, IN KYUNG;YUN, HYE JUNG;CHAE, WON MOOK;HWANG, KWANG TAEK