| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device which simply performs processing up to detection of minute foreign matter and certainly detects the minute foreign matter. SOLUTION: The surface of each of second photodiodes 421 includes an area integral multiple of that of the surface of each of first photodiodes 311. In order to obtain this constitution, a plurality of the second photodiodes 421 are respectively arranged so that the distance L42 of one side in the crossing direction L2 of each of the second photodiodes 421 becomes the integral multiple (e.g., twice) of the distance L32 of one side in the crossing direction L2 of each of the first photodiodes 311. In this case, the size (area) of each of the second photodiodes 421 becomes twice the size (area) of each of the first photodiodes 311. COPYRIGHT: (C)2011,JPO&INPIT
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