| 摘要 |
A micromachined air-cavity resonator, a method for fabricating the micromachined air-cavity resonator, and a band-pass filter and an oscillator using the same are provided. In particular, a micromachined air-cavity resonator including a current probe fabricated together when the air-cavity resonator is fabricated, and a groove structure for rejecting detuning effect when an external circuit of a package substrate is coupled to the current probe, a millimeter-wave band-pass filter using the same, and a millimeter-wave oscillator using the same are provided. The micromachined air-cavity resonator includes a cavity structure which comprises a current probe simultaneously formed through a fabrication process, and a groove structure; and a package substrate integrated with the cavity structure. Thus, the micromachined air-cavity resonator can be easily fabricated by etching a silicon substrate and easily integrated to the package substrate using the flip-chip bonding.
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