OPTICAL INSPECTION SYSTEM

摘要

Optical inspection system for inspecting objects on or in an essentially plane surface, the inspection system comprising a first and a second inspection units, each inspection unit comprising a light source unit emitting light through at least one beam splitter toward the objects to be inspected, and an interferometer positioned between the beam splitter and the object, the interferometer unit comprising at least one interferometer using a reference beam and a measuring beam, the measuring beam being aimed at and reflected from the object, the return signal propagating through the beam splitter to a sensor unit.