Kalibrierverfahren zur Durchführung von Mehrtormessungen auf Halbleiterscheiben,申请号DE200410020037-传众专利搜索

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发明名称	Kalibrierverfahren zur Durchführung von Mehrtormessungen auf Halbleiterscheiben
摘要
申请公布号	DE102004020037(B4)	申请公布日期	2010.12.09
申请号	DE200410020037	申请日期	2004.03.29
申请人	SUSS MICROTEC TEST SYSTEMS GMBH	发明人	HEUERMANN, HOLGER;RUMIANTSEV, ANDREJ
分类号	G01R35/00;G01R27/28;G01R27/32;H01L21/66	主分类号	G01R35/00
代理机构		代理人
主权项
地址

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